As we now mark the 10th anniversary of the Flextura PVD platform, we are launching a series of stories that look back at the journey – how it was developed and what has shaped the platform. Case stories from the labs and facilities that rely on Flextura every day. Deep dives into the modularity, scalability, and engineering thinking behind the platform. This is how it began.
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Polyteknik AS
Moellegade 21
9750 Oestervraa
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The customer brief: A challenge that shaped a platform
Ten years ago, SINTEF Industry approached Polyteknik with a clear and concrete challenge: to develop a PVD system tailored for advanced thin-film research, one that could accommodate a wide range of materials and provide the freedom to explore new material combinations as ideas evolved. SINTEF is one of Europe’s largest independent research organisations, with more than 2,200 employees representing over 80 nationalities. At SINTEF’s thin-film laboratory in Oslo, functional material coatings are developed for applications including gas separation membranes, sensors, batteries, solar cells, and electrolysis cells.
The Flextura platform: Modular by design, scalable by nature
The Flextura PVD platform was developed to meet the requirements from SINTEF and introduced a new way of thinking: modular, scalable, and designed to grow with the researcher’s ambitions. Start with a single process module, add chambers and analytical tools as needs evolve. Automated deposition and analysis reduce time spent on routine operation – leaving more time for data interpretation, insight generation, and discovery of the next promising material.
The Flextura delivers high-quality, high-uniformity layers of metals and oxides on wafers, with multiple RF and DC magnetron sources in planar or confocal configurations. The system supports deposition ranging from relatively simple metals and alloys to reactive sputtering of oxides and nitrides. High-temperature deposition up to 800 °C and residual gas analysis (RGA) provide the necessary level of process control. An electron beam evaporation chamber dedicated for deposition of silicon for solar cells and battery applications allows growth of silicon at temperatures between RT and 1,000 °C.
A decade on: From first customer to pan-European reference
SINTEF Industry was Polyteknik’s first Flextura customer, and today systems are installed at R&D and industrial facilities across Europe.
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