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TU Dresden, Institut für Halbleiter- und Mikrosystemtechnik (IHM)
Research institution
Target markets
Electronics·Public Sector·Services
Industries
Materials·Research & Development·Technology
Portfolio
Atomic Layer Deposition (ALD)·Back End of Line Procsses·Colleges / Universities·Electronic·Equipment·Micro- / Nanoelektronics·microsystems technology·Optoelectronic Devices and Systems·Semiconductor Industry·Semiconductor Technology
Certificates
Contact
Nöthnitzer Straße 64
01187 Dresden
01187 Dresden
0351 463 35468
Contact Person
Dr. Martin Knaut
About this member
The Institute of Semiconductor and Microsystems Technology is made up of four professorships, each of which is dedicated to the new challenges of the progressive miniaturization of microsystems and in particular the use of new materials and active principles in nanotechnology in the fields of semiconductor technology, microsystems technology, optoelectronic components and systems and nanoelectronics. The joint use of technological resources is particularly evident in the IHM's clean room. An extensive portfolio of silicon-based technological processes is available here. The expertise of IHM employees ranges from electrical engineering, physics and materials technology to chemistry.
About the Institute:
At the institute for semiconductors and microsystems technology (IHM) of the Dresden University of Technology: (TUD) three professorships are linked closely together:
- Semiconductor Technology (HLT) – Prof.Dr.rer.nat. Johann W. Bartha
- Microsystems Technology (MST) – Prof.Dr.-Ing.habil. Wolf-Joachim Fischer
- Optoelectronics Devices and Systems (OES) – Prof. Dr.-Ing. H. Lakner
The professorship „Semiconductor Technology“ is dedicated to the education, research and development for integrated circuit manufacturing. A focus within this field is the Back End of Line (BEOL) or on chip interconnect technology, which covers the wiring on the chip from the transistors to the contact pads.
Design, simulation, fabrication and qualification of microsystems is covered at the professorship “Microsystems Technology”. Here the topics centre on organic semiconductor devices, intelligent sensors, gas sensors, SAW devices and self sufficient power supply.
The professorship „Optoelectronics Devices and Systems“ covers the education research and development on design, manufacturing and application of MOEMS (Micro Optoelectromechanical Systems) as well as OLED (Organic Light Emitting Diodes).
Numerous research projects in cooperation with industry partners demonstrate the competence of our institute especially in the treatment of applied topics. A recently finished Clean Room Lab (400 sqm Clean Lab Space) enables the processing of wafers (Lithography, Vacuum Deposition- and Etch incl. Atomic Layer Deposition, Electrochemical Deposition, Chemical Mechanical Planarization) at a high quality standard.
