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SONOTEC GmbH

Company type

Target markets

Air Bubble Detection·Flow Rate Measurement·Flow-Bubble Measurement·Level Detection

Industries

Micro- / Nanoelektronics

Portfolio

air bubble·air bubble detection·Biotechnology·bubble sensor·clamp-on·contact·flexible tube·flexible tubing·flow meter·flow rate·flow rate measurement·flow volume·Flow-Bubble Measurement·level detection·Materials·Medical Technology / Pharma·Micro- / Nanoelektronics·non-invasive·Semiconductor Industry·Sensor·Ultrasound·volume·volume measurement

Certificates

About this member

SONOTEC - Ultrasonic Solutions

Gegründet 1991 ist die SONOTEC GmbH heute ein weltweit führender Produkt- und Lösungsspezialist für Präzisionsmesstechnik. Mit etwa 200 Mitarbeitern entwickelt und fertigt das Technologieunternehmen am mitteldeutschen Standort Halle (Saale) in den drei Geschäftsbereichen – Nicht-invasive Flüssigkeitsüberwachung, Vorbeugende Instandhaltung und Ultraschallwandler – innovative Ultraschallmesstechnik. Zum weltweit vertriebenen Portfolio zählen kundenspezifische Ultraschallwandler und -sensoren sowie Prüfgeräte und Messtechniklösungen für eine Vielzahl verschiedener Branchen und Industrien.


Geschäftsfelder

  • Halbleiterindustrie
  • Medizintechnik / Pharma
  • Biotechnologie

Kernkompetenz

  • Zulieferung: Material / Komponenten

Spezialisierung

  • Durchflussmessung
  • Luftblasendetektion
  • Flow-Bubble Messung
  • Füllstandsüberwachung

Nicht-invasive Flüssigkeitsüberwachung in der Halbleiterindustrie

In der Halbleiterindustrie spielen die kompakten Ultraschallsensoren von SONOTEC bei der Herstellung von Wafern eine große Rolle. Hier kommen in unterschiedlichen Prozessen des Nassverfahrens eine Vielzahl von abrasiven, anhaftenden und korrosiven Flüssigkeiten zum Einsatz. Die Sensoren haben dabei den enormen Vorteil, dass ihre Messung nicht-invasiv und nicht-intrusiv erfolgt und damit sowohl für die Durchflussmessung als auch für die Luftblasendetektion optimal geeignet sind.


Vorteile der kontaktlosen Messung

  • Berührungslose und kontaminationsfreie Überwachung der Prozesse
  • Einsetzbar für eine Vielzahl an Medien
  • Einfaches Einlegen des Schlauches
  • Problemlose Nachrüstung der Anlagen
  • Keine Ausfallzeiten der Maschinen bei Sensorwechsel
  • Kein Leckagerisiko
  • Kein Verschleiß
  • Gesteigerte und verlässlichere Produktivität der Anlagen und damit eine gesteigerte Ausbeute

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SONOTEC - Ultrasonic Solutions

Founded in 1991, SONOTEC GmbH has developed into one of the world's leading product and solution specialist for innovative measurement technologies. With about 200 employees and a modern corporate structure comprising three independent business units - Non-Invasive Fluid Monitoring, Preventive Maintenance and Ultrasonic Transducers - the technology leader operates its global sales activities from the Halle (Saale) based German headquarter. The distributed portfolio includes customized ultrasonic transducers and sensors as well as testing devices and measurement solutions for a variety of different industries.


Business Segments

  • Semiconductor Industry
  • Medical Technology / Pharma
  • Biotechnology

Core Competences

  • Supplier: Materials

Specialization

  • Flow Rate Measurement
  • Air Bubble Detection
  • Flow-Bubble Measurement
  • Level Detection

Non-Invasive Fluid Monitoring in the Semiconductor Industry

In the semiconductor industry the compact sensors from SONOTEC play an important role in wafer manufacturing. In different wet processes several abrasive, adherent, and corrosive liquids are used. The advantage of the sensors here is that their measurement is non-invasive and non-intrusive and therefore is ideal to both measure flow and detect air bubbles.

Advantages of Non-Invasive Measurement

  • Contact- and contamination-free process monitoring
  • Applicable for a wide range of media
  • Simple tube insertion
  • Simple retrofit
  • No equipment downtime in case of sensor exchange
  • No risk of leakages
  • No wear and tear
  • Improved and more reliable plant productivity and therefore improved yield
SEMIFLOW CO.65

Flow Measurement in the Semiconductor Industry

If a cleaning solution is under- or overdosed, additional resources are required, since the cleaning process needs to be repeated. At worst, the wafers must be discarded and a huge loss in value is incurred. A precise flow measurement is therefore decisive for an efficient use of the production resources.

SEMIFLOW CO.65 – Flow sensor specifically designed for applications in the semiconductor industry

  • Highly precise and contact-free measurement
  • 8 sensor sizes (¼”, 3/8″, ½”, ¾”, 1″, 1 ¼“, 40A, 50A OD) for a wide range of tube sizes
  • Version for the application in hazardous environments (Ex Zone 1)
  • Plastic housing (PVCC) and plastic connector (PA)
  • Screwed lid and flexible inlay for an optimal coupling between tube and transducer
  • No external electronics for a compact design and simple handling
  • Customer calibration for different flow rates
SEMIFLOW CO.65
SONOCHECK ABD06

Air Bubble Detection in the Semiconductor Industry

The presence of air bubbles in critical processes can have extensive consequences in wafer manufacturing. In photolithography the occurrence of air bubbles in photoresist may cause a defect of the wafers; air bubbles in process coolant may lead to an interruption of production processes. A timely detection of air bubbles is therefore crucial to achieve production targets.

SONOCHECK ABD06 – Sensor for air bubble detection

  • Non-invasive measurement
  • No coupling medium required
  • Compact design with built-in electronics
  • CE certified
  • ATEX certified (optional)
  • IP67
  • No wear and tear
  • Optional software for easy parameterization and testing
SONOCHECK ABD06
SONOFLOW IL.52

SONOFLOW IL.52 – Inline flow meter for precise measurement of low volume flow rates

  • Highly accurate measurement of ultra-low flows
  • Repeatability of +/- 1%
  • Quick measurement without any time lag
  • Independent of colour and electromagnetic characteristics of the liquid
  • Measurement of intermittent flows
  • No wear and tear
  • Easy data evaluation and process integration
SONOFLOW IL.52

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