SONOTEC GmbH

Flow Measurement in the Semiconductor Industry

If a cleaning solution is under- or overdosed, additional resources are required, since the cleaning process needs to be repeated. At worst, the wafers must be discarded and a huge loss in value is incurred. A precise flow measurement is therefore decisive for an efficient use of the production resources.

SEMIFLOW CO.65 – Flow sensor specifically designed for applications in the semiconductor industry

• Highly precise and contact-free measurement
• 8 sensor sizes (¼”, 3/8″, ½”, ¾”, 1″, 1 ¼“, 40A, 50A OD) for a wide range of tube sizes
• Version for the application in hazardous environments (Ex Zone 1)
• Plastic housing (PVCC) and plastic connector (PA)
• Screwed lid and flexible inlay for an optimal coupling between tube and transducer
• No external electronics for a compact design and simple handling
• Customer calibration for different flow rates

Air Bubble Detection in the Semiconductor Industry

The presence of air bubbles in critical processes can have extensive consequences in wafer manufacturing. In photolithography the occurrence of air bubbles in photoresist may cause a defect of the wafers; air bubbles in process coolant may lead to an interruption of production processes. A timely detection of air bubbles is therefore crucial to achieve production targets.

SONOCHECK ABD06 – Sensor for air bubble detection

• Non-invasive measurement
• No coupling medium required
• Compact design with built-in electronics
• CE certified
• ATEX certified (optional)
• IP67
• No wear and tear
• Optional software for easy parameterization and testing

SONOFLOW IL.52 – Inline flow meter for precise measurement of low volume flow rates

• Highly accurate measurement of ultra-low flows
• Repeatability of +/- 1%
• Quick measurement without any time lag
• Independent of colour and electromagnetic characteristics of the liquid
• Measurement of intermittent flows
• No wear and tear
• Easy data evaluation and process integration