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Mitsubishi Chemical Europe GmbH

Company type

Target markets

High Vacuum Equipment Components·Refurbishment and Finishing of Reactor Parts


Energy Systems


Energy Systems·High Vacuum Equipment Components·Process service·Refurbishment and Finishing of Reactor Parts·Semiconductor Industry


About this member

Products and Services:

Cleanpart Group is a leading provider of advanced engineering services for the semiconductor industry and related industries for over 30 years.
Cleanpart’s main focus is the cleaning, coating, repair, redesign and supply of recyclable parts in particle-sensitive production environments (PVD, CVD, CMP, Etch, Implant etc.) to achieve superior chamber performance. Cleanpart uses a broad range of cleaning methods, coating technologies, production know-how and advanced IT solutions.
We achieve this by combining

  • More than 30 years of experience in the field.
  • A Passionate focus on the customer
  • Advanced chemical, mechanical and process engineering technologies
  • Our ability to rapidly develop custom solutions understanding the specifics of a particular customer’s process

Cleanpart’s emphasis on non-abrasive cleaning methods achieves the longest parts-life and highest performance available in the industry.

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