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Freiberg Instruments GmbH

Company type

Target markets

Defekt Analytic·Metrology·Physical Metrology·Test Equipment




Applications·Biotechnology·Defekt Analytic·Electronic·Environmental Technoloy·Equipment·Medical Technology / Pharma·Metrology·Photovoltaics·Physical Metrology·Semiconductor Industry·Software·Test Equipment



Delfter Str. 6
09599 Freiberg

Contact Person

Dr. Kay Dornich
+49 3731 41 954 - 0

About this member

Products and Services:

The objective of the company is the development and production of a new family of state of the art contact less and non destructive inline measurement tools for the semiconductor industry and research facilities.
These measurement techniques open for the first time the possibility to measure electrical parameters such as lifetime, diffusion length and mobility of charge carriers with so far not achieved sensitivity. This allows for a combination of high spatial resolution, high measurement speed even at very low injection levels. These unusual combination of properties make the methods ideally suited for inline applications. Again owing to the high sensitivity, it is even possible to expand the measurements to the investigation of thin epitaxial layers as found in device fabrication. A special kind of these techniques allows for contact less, non destructive and topographic investigations of defect properties.
A large variety of semiconductor materials can be investigated. Many processing steps can be followed ranging from the preparation of the starting material till to the final device ready for packaging.

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