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Laser-Based Sample Preparation for Microstructure Diagnostics
The microPREP™ PRO enables laser-based sample preparation for various specimen preparation applications. It complements existing approaches to sample preparation, such as ion beam processing. Several laser sources are available for installation to enhance the individual preparation process. microPREP™ PRO is suited to ablate metals, semiconductors, ceramics, polymers, and compound materials. It creates new vistas for material and process development and failure analysis. Suitable for TEM, SEM/FIB cross sectional analysis, atom probe, X-ray tomography and micromechanical testing processes.
Selective Laser Annealing for Ohmic Contact Formation (OCF)
The microPRO XS for OCF system provides laser annealing with high repeatability and throughput in a versatile system. Combining a state-of-the-art laser optic module with 3D-Micromac’s modular processing platform, the microPRO XS is ideally suited for ohmic contact formation (OCF) in silicon carbide (SiC) power devices. This laser system features a UV-wavelength diode-pumped solid-state (DPSS) laser source with nano-second pulses and spot scanning to process the entire metalized backside of SiC wafers. It forms ohmic interfaces and cures grinding defects, while preventing the generation of large carbon clusters and heat-related damage to the front-side of the wafer.
Selective Laser Annealing for Monolithic Magnetic Sensors
The microVEGA™ xMR for selective laser programming of magnetic sensors is an industrial production-approved technology with many advantages. By enabling a one-step process, this solution significantly reduces the costs for sensor chip manufacturing. Selective laser pinning on microVEGA™ xMR is by far the most efficient technology in terms of cost, throughput, yield and quality (sensitivity) to accurately program magnet sensor devices. The microVEGA™ xMR is fully automated and can be programmed for different sensor and wafer designs. The conversion from GMR to TMR is done only by selecting the correct recipe. All important tool data during programming can be organized by product type, saved in log files and ― if required ― transmitted via standard data interfaces.