Jenoptik: High-tech fab in Dresden receives state-of-the-art electron beam lithography system

January 10, 2024: The photonics group Jenoptik is investing a low double-digit million euro amount in the equipment park of the high-tech fab currently under construction in Dresden. The new electron beam lithography system (“e-beam”) will be used to manufacture high-precision micro-optical components for customers in the semiconductor and optical communication sectors. The system will be delivered at the beginning of 2025 and is manufactured by Jena-based e-beam technology specialist Vistec Electron Beam GmbH.

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Konzeptbild der neuen Fab. Foto: studiobrand.3dvisuals

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Creating the smallest structures with the highest precision

An electron beam lithography system of this type can “write” structures with a precision in the 10-nanometer range (approximately 1/2.000th of a hair) on substrates up to 300 mm in size.

The Vistec SB3050-2 electron beam lithography system is based on the so-called variable shape beam principle, which allows even large areas to be structured with high precision and effectiveness. The high degree of automation, combined with flexibility in terms of usable substrates, are further features of the Vistec SB3050-2 that enable it to be used in an industrial environment. Equipping the system with cell projection functionality opens up further possibilities for applications in micro-optics.

Jenoptik has been active in Dresden since 2007. With the new high-tech fab at Airportpark Dresden, the company is bundling its production, which is currently spread across several small external locations, and expanding its capacities at the same time. The clean room production in the new fab covers 2,000 square meters with clean room areas of classes ISO 5 and 3 and meets the highest requirements for freedom from vibration and temperature constancy.

High environmental standards are taken into account for the entire fab: Jenoptik is striving to fulfill the currently most comprehensive and strictest building criteria in terms of sustainability with the “KfW 40 Standard” and the “LEED Gold Standard Certification”. At the same time, high-quality jobs will be created and the number of employees on site will increase to a total of more than 120. The Saxon state capital will thus become the main location for the micro-optics division.

About Jenoptik

Optical technologies are the basis of our business: Jenoptik is a globally active photonics group and operates in the two divisions Advanced Photonic Solutions and Smart Mobility Solutions. The non-photonic activities, which are particularly geared towards the automotive market, are managed as independent brands under the Non-Photonic Portfolio Companies. Our key markets primarily include Semiconductor & Electronics, Life Science & Medical Technology and Smart Mobility. More than 4,400 employees (fiscal year 2022) work for the Jenoptik Group worldwide, headquartered in Jena (Germany). JENOPTIK AG is listed on the German Stock Exchange in Frankfurt and is included in the MDax and TecDax. In the 2022 financial year, Jenoptik generated revenue of 980.7 million euros.

About Vistec Electron Beam GmbH

Vistec Electron Beam GmbH, based in Jena, is a manufacturer and supplier of electron beam exposure systems based on the variable shaped beam principle. They are used both in the semiconductor industry and in applied research.

The electron beam exposure systems are used for direct writing on silicon or composite materials, mask writing and new markets. Technical solutions such as efficient data processing or fast writing of repeat structures (cell projection) open up new application possibilities, e.g. for AR/VR. Other applications include micro- and nanoelectronics, micro-optics, integrated optics, photonics, metamaterials and nano- and biotechnologies. Due to automated handling, high flexibility, writing accuracy and productivity, the systems are also suitable for prototype and small series production. In addition to the main site in Jena, the company operates service & support centers in Asia, USA and Europe.

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Further links

👉 www.jenoptik.de  

Photo: studiobrand.3dvisuals

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