Vector mirror actuators are required for deflecting laser light in many applications in space: for coupling spacecraft to the space station (rendezvous), for navigating autonomous service robots and self-driving vehicles or in small satellites for dynamic object tracking. At Fraunhofer IPMS, a MEMS vector scan module has now been made ready for use in space as part of the MiniLiDAR project.
The module consists of a hybrid integrated 2D MEMS vector scanner that works using an electromagnetic drive. It has a relatively large mirror with a diameter of 5 mm, which is gimballed. This allows the scanner to achieve large, quasi-static 2D deflection angles of up to ±13° (mechanical) around a common pivot point. This enables a large scan field of 52° x 52° (field of view) with high positioning dynamics and optical resolution, while the optical system can be designed simply.
Dr. Thilo Sandner, Group Manager Active Microoptical Components and Systems at Fraunhofer IPMS, is optimistic: “Thanks to its damped suspension, the new scan module can now even survive a rocket launch without damage. Thanks to an ingenious design, the module is very small compared to conventional galvanometer scanners, thus saving space in the entire optical system and consuming around ten times less power, which also leads to lower system costs. Thanks to its solid-state design (without mechanical bearings subject to friction), it is stable over the long term and wear-free.”
Jena-Optronik GmbH is involved in the MiniLiDAR project with its many years of experience in space travel and is responsible for the entire LIDAR system. Fraunhofer IPMS has contributed its unique expertise in the design of MEMS scanner mirrors and modules through to automated, high-precision micro-assembly to the project. This has made it possible to achieve the necessary robustness for high shock and vibration resistance.
The first industrial and project partners have already shown interest in using such modules. As well as in space, the scan modules can also be used for medical diagnostics and laser therapy in ophthalmology, for example. Thanks to a thicker mirror plate, the mirrors are well suited for highly reflective dielectric mirror coatings with high planarity, so that they can withstand higher laser powers and pulse energies. They can now also be used in laser marking, for example. Scanner mirrors can also play an important role in free space optical communication (FSO). The scientists are looking forward to further exciting applications for which they can optimize the versatile MEMS scanner mirrors.
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Further links
👉 www.ipms.fraunhofer.de
Photo: Fraunhofer IPMS
