Company type
Compugraphics Jena GmbH

Contact
07751 Jena
Contact Person
About this member
Mask Shop Compugraphics Jena GmbH
Compugraphics Jena GmbH manufactures photomasks (reticles, 1x masks and copies) for industry and R&D in semiconductors, microsystems, sensors, opto-electronics, and optical metrology.
We offer:
E-beam lithography
Two e-beam systems from Leica for mask formats from 3 to 7 inch and direct write of wafers till 6 inch.
Laser lithography
Two laser writers DWL 400 from Heidelberg Instruments to process masks substrates inbetween 2 and 16 inch with thicknesses till
12 mm. ML&C has already manufactured many hundreds of large format masks (9 inch and larger) for wafer level packaging and other applications in metrology and microtechnics.
Mask Copies
Formats 2 to 7 inch.
Photolithographic structuring of special components for micro-technology