Company type
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Semics Europe – OPUS Semiconductor Equipment Deutschland GmbH
Small companies (<50 employees or <10 million annual turnover)
Target markets
Electronics
Industries
Portfolio
Equipment·Semiconductor
Certificates
Contact
Yorckstraße 22
93049 Regensburg
93049 Regensburg
Contact Person
Michail Efstratiadis
About this member
OPUS3 SD
OPUS3 SD is the only prober in the market which handles 6″ & 8″ and 12 inch SEMI standard wafers, without having any change kit.
It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput.
It is suitable for automation with top loader.
Key features
- Compact size for space efficiency
- Universal probe card changer
- Reliable temperature control
- Stiff and strong Z structure
- Map shift prevention
- Real-time recipe validation
- Intelligent pin alignment algorithm
- Smart probing route algorithm
- Flat loader for smallest foot print
- Compatible with all type of tester
Specification Overview
| Name | OPUS3 SD |
|
Wafer Size |
6″, 8″, 12″ |
| Dimensions | 1530(W) x 1782(D) x 960(H) |
| X, Y Probing Area | X : ±180mm, Y : ±175mm |
| Needle Force | 450kgf |
| XY Accuracy | X : +1.0㎛, Y : ±1.0㎛ |
| Temp range | -55℃ ~ 200℃ |
OPUS3 SD
