Process Insights – Tiger Optics LLC

Need to monitor AMCs in multiple fab micro-environments? Surveying different micro-environments in a fab is now fast and easy with our TIGER OPTICS™ GO-cart™ – the mobile solution for monitoring Airborne Molecular Contaminants (AMCs). Effortlessly monitor Airborne Molecular Contaminants (AMCs) in various fab micro-environments with the GO-cart.

This mobile solution features:

Quickly survey multiple micro-environments in your fab

Simultaneous, real-time monitoring of critical contaminants (NH3, HCl, HF, and more)

Customizable configurations with up to three T-I Max analyzers

Compact, low power, fanless vacuum pumps optimized for cleanroom operation

Take control of your fab’s contamination monitoring

Space for up to three T-I Max monitors

Integrated low power, fanless vacuum pump

No calibration, maintenance or consumables required (for both cart and analyzers)

Top-mounted central control touchscreen

Integrated UPS backup power supply (optional)

Conductive ESD paint (optional)

Our TIGER OPTICS™ VeraSpec™ Atmospheric Pressure Ionization Mass Spectrometer (APIMS) is designed for reliable and repeatable low parts-per-trillion detection limits for contamination control in Ultra-High Purity (UHP) gases used in semiconductor and other high-tech industrial applications.

Contamination is costly, and for more than 30 years our EXTREL quadrupole mass spectrometry technology has been the research and industrial standard for on-line detection of low-level components of gas mixtures. Our VeraSpec APIMS utilizes an EXTREL 19mm, tri-filter quadrupole mass spectrometer filter ideal for semiconductor gas analysis for the very best performance, reliability, and uptime.

Industry-best lower detection limits (LDLs) for bulk gas analysis

Real-time, multi-species monitoring for ALL critical Impurities in bulk gases including trace O2, H2, H2O, CH4, CO, CO2, Xe and more

Well-established, powerful mass spectrometry technology

Unparalleled measurement range from PPT to 100% with unique dual-source ionization configuration

Ultra-High Purity (UHP) Gas Analyzers with Cavity Ring-Down Spectroscopy (CRDS) Technology

Ensure unmatched precision and sensitivity in gas quality analysis with our TIGER OPTICS™ Ultra-High Purity (UHP) gas analyzers, powered by advanced Cavity Ring-Down Spectroscopy (CRDS). Trusted globally across industrial gas, medical gas, and chemical processing industries, our analyzers are engineered to detect trace-level moisture and other impurities in a wide range of process gas streams—including inert, reactive, corrosive, bulk, and specialty gases.

Why Choose our TIGER OPTICS Ultra-High Purity (UHP) Gas Analyzers?

Our UHP gas analyzers utilize CRDS technology, a highly sensitive, non-destructive method that delivers quantitative measurements of molecular absorption. This enables ultra-precise trace gas analysis in applications demanding the highest purity standards.

How TIGER OPTICS CRDS Works in Ultra-High Purity Analysis

Cavity Ring-Down Spectroscopy operates by measuring the absorption rate of laser light within a highly reflective optical cavity. A laser pulse is injected into the cavity, where it reflects thousands of times between two ultra-reflective mirrors. As the light interacts with the gas sample, even minute concentrations of impurities—such as moisture, oxygen, or hydrocarbons—absorb part of the light, causing its intensity to decay.

The “ring-down time”, or how long it takes for the light to diminish to a threshold level, is precisely measured. This decay time correlates directly to the concentration of the target gas species, offering real-time, highly accurate results.

BULK GAS CONTINUOUS QUALITY CONTROL CQC MONITORING SOLUTIONS

Ensuring Quality in the Semiconductor Industry

Quality control (QC) is essential in the electronics and semiconductor industry to ensure reliable, high-performing products reach customers. Got questions? Contact us.

At the start of the production chain, Inward Quality Control (IQC) acts as a critical checkpoint. It involves inspecting incoming materials to ensure only top-quality components are used in manufacturing.

Meanwhile, Continuous Quality Control (CQC) focuses on maintaining high standards throughout the entire manufacturing process. It includes ongoing monitoring, analysis, and improvement to meet the industry’s strict precision and reliability requirements.

Our CQC Monitoring Solutions

To support these rigorous standards, we offer advanced CQC solutions designed to meet a wide range of customer needs:

Multiple technology options to suit diverse applications

A knowledgeable team supporting UHP and semiconductor IQC, OQC, and CQC processes

Accurate trace impurity measurements before and after purification

One-year warranty on all analyzers and cabinets

Two years of on-site service and spare parts

ENABLING PPT MOISTURE DETECTION IN SEMICONDUCTOR MANUFACTURING

Engineered for the most demanding purity standards, the TIGER OPTICS™ HALO KA Max™ H₂O is a cutting-edge UHP gas analyzer designed to deliver trace-level moisture detection in bulk gases, specialty gases, and semi bulk gas streams used in semiconductor manufacturing.

Built upon our renowned Continuous-Wave Cavity Ring-Down Spectroscopy (CRDS) technology—trusted and validated by customers worldwide – the HALO KA Max H₂O enables precise measurement of moisture impurities down to 100 parts per trillion (ppt). It offers drift-free stability, rapid response to process upsets, and unmatched reliability for ultra-high purity (UHP) gas monitoring.

Key Features of the HALO KA Max H₂O UHP Gas Analyzer:

Ultra-sensitive detection of H₂O down to 100 ppt

Optimized for UHP gases, including bulk, specialty, and semi bulk gas applications

CRDS-based technology ensures precision, stability, and real-time performance

Compact, all-in-one analyzer with a user-friendly interface

Fast installation and effortless operation

Built-in zero verification for simplified maintenance

Ideal for semiconductor-grade gas quality control

UHP GAS ANALYZER FOR PPT-LEVEL of H2O IN BULK AND SPECIALTY GASES

Looking for ultra-sensitive moisture detection in high-purity gas applications? The TIGER OPTICS™ HALO KA™ H₂O is the ultimate UHP gas analyzer, engineered to deliver parts-per-trillion (ppt) level detection of H₂O in bulk gases, specialty gases, and complex gas mixtures.

Unmatched Performance for Bulk & Specialty Gas Analysis

Designed for demanding environments like semiconductor manufacturing, the HALO KA H₂O uses proprietary Cavity Ring-Down Spectroscopy (CRDS) to detect trace moisture impurities as low as 100 ppt—even in challenging gas matrices like helium or germane (GeH₄) in hydrogen. Its fast response time, drift-free stability, and built-in zero verification make it a low-maintenance, high-performance solution for critical gas purity monitoring. Contact us for more information.

Features of the HALO KA H₂O UHP Gas Analyzer with CRDS Technology

Ultra-high sensitivity: Detects H₂O levels down to 100 ppt

Compatible with a wide range of gases: Ideal for bulk gases, specialty gases, and reactive mixtures

CRDS technology ensures laser-based precision and long-term stability

Plug-and-play installation with easy operation and minimal upkeep

Built-in zero verification for simplified maintenance

Perfect for semiconductor-grade gas purity control

Utilizing mid-infrared Quantum Cascade Lasers (QCLs), our new TIGER OPTICS™ HALO Max QCL™ CO2 allows dramatic decreases in detection limits for certain molecules. The HALO Max QCL CO2 for ppt-level carbon dioxide detection, is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.

The HALO Max QCL CO2 for ppt-level carbon dioxide detection, it is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.

It perfectly complements our HALO KA Max series (for H2O, NH3 and CH4), the Halo OK (for O2) and our other QCL-based analyzer, the HALO Max QCL CO to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.

ANALYZER SERIES BASED ON QUANTUM CASCADE LASER CAVITY RING-DOWN SPECTROSCOPY (QCL-CRDS)

Parts-per-trillion (ppt) detection capability for carbon dioxide (CO2) in UHP bulk gases

Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity

Absolute measurement (freedom from calibration)

Excellent speed of response at ppb levels and below

Continuous measurement – no batch processing typical with GCs

Robust design & maximum ease of use

The TIGER OPTICS™ HALO™ 3 CO analyzer is your trusted solution for low-level CO monitoring, delivering precise, real-time detection down to 40 parts per billion (ppb) using our industry-proven Cavity Ring-Down Spectroscopy (CRDS) technology.

Accurate and reliable carbon monoxide (CO) detection is essential for ensuring ultra-high purity (UHP) gas quality, especially in hydrogen production, chemical processing, and fuel cell applications. Even trace levels of CO can poison catalysts and compromise both product performance and reputation.

Ensure Gas Purity with the HALO 3 CO UHP Gas Analyzer

Designed for continuous, online gas monitoring, the HALO 3 CO provides drift-free stability, rapid response times, and zero maintenance calibration, making it ideal for:

CO detection in fuel-cell-grade hydrogen

Quality assurance in hydrogen refineries and chemical plants

UHP gas analysis for gas suppliers and industrial gas production

Process control applications where gas purity is critical

Detect gas quality upsets before they damage your process. Using our TIGER OPTICS™ HALO™ OK trace-level oxygen analyzer, you can verify oxygen impurity levels with part-per-trillion accuracy, drift-free stability and instantaneous response. You’ll find our system exceptionally easy and fast to install, and effortless to maintain, with built-in zero verification. Its robust design—free of moving parts—results in an analyzer that has a high Mean Time Between Failure (MTBF) rate and a very low Cost of Ownership (CoO). Contact today for more information.

With its patented catalytic conversion technique, utilizing a minute amount of hydrogen to cleanly and safely convert oxygen to moisture, the HALO OK offers a fully laser-based solution for Continuous Quality Control of your process. Based on powerful Cavity Ring-Down Spectroscopy, the HALO OK aligns with the SEMI F-112 standard for moisture dry-down characterization of gas systems. Pair the new Halo OK with our Halo KA for ppt-level moisture measurement to enjoy the many advantages of profit-boosting CRDS technology for both critical contaminants.

DESIGNED FOR TRACE-LEVEL OXYGEN ANALYSIS, THE HALO OK OFFERS:

Industry-leading parts-per-trillion detection capability

Unprecedented speed of response

Wide dynamic range

Absolute measurement (freedom from need for calibration gases)

Low maintenance and cost of ownership

Compact, portable package, ideal for both fixed and mobile cart installation

Direct measurement in many matrices

Our TIGER OPTICS™ HALO™ QRP for Moisture Monitoring in Low Pressure Chambers is optimized to operate under these low-pressure conditions and deliver exact and reliable real-time measurement to verify moisture residue in, for example, the load lock, transfer and process chambers before H2O contaminants compromise the subsequent process step. Based on our proven Cavity Ring-Down Spectroscopy (CRDS) technology, the HALO QRP sets new standards in ease-of-use and measurement precision for this application and operates at chamber pressures as low as 1 Torr.

Modern semiconductor deposition processes—from low-temperature epitaxy to ALD and MOCVD—operate routinely at chamber pressures far below atmosphere and approach the single-digit torr range. At the same time, process temperatures are continuously decreasing. Under these conditions, residual moisture in the chamber poses a significant threat to process quality and production yields.

DESIGNED FOR TRACE LEVEL MOISTURE ANALYSIS IN LOW PRESSURE (<50 TORR) APPLICATIONS, THE HALO QRP OFFERS:

Moisture detection at partial pressure of 1 µTorr and below

Absolute accuracy and excellent precision

Wide dynamic range—over four orders of magnitude

Low cost of ownership and operational simplicity

Clean technology—no external calibration gases required

Compact analyzer footprint, also available as OEM module for equipment/system integration

In order to satisfy the demands of the electronic gas market, Air Separation Units (ASUs) need to create gases with ever-increasing purity. To provide the industry with the continuous, multi-species detection that is necessary at lower detection limits, we are proud to introduce the TIGER OPTICS™ Prismatic™ 3+.

With detection limits as low as 3 ppb, our Prismatic 3+ Cavity Ring-Down Spectroscopy (CRDS) analyzers will reduce downtime and save money on preventative maintenance that is typically required by other technologies.

The Prismatic 3+ laser-based, multi-species analyzer offers up to 4 analytes (H2O, CO, CO2 & CH4), providing measurements in seconds without the need for periodic calibration. Our CRDS analyzers are simple to install and operate, perfect for unmanned applications.

THE PRISMATIC 3+ FEATURES & BENEFITS:

Detection limits as low as 3 ppb

Laser-based, multi-species analysis of up to 4 impurities (H2O, CO, CO2 & CH4)

Drift-free accuracy and excellent repeatability

No calibration + low maintenance = maximum uptime and lowest cost of ownership

Extremely fast speed of response

Simple & automated operations; ideal for remote, unmanned locations 

For the first time, powerful advanced spectroscopy is available at a popular price for a host of applications, from quality assurance to cylinder filling, as well as welding, medical, industrial and high-purity gas production; bulk delivery and distribution transfer points; and more. Say goodbye to cumbersome, complex, costly and labor-intensive mid-20th century technology. Gone is the need for calibration, spare parts, cramped ranges, and worries about drift and downtime. Our TIGER OPTICS™ Spark™ H2O is fast, easy to start up and operate.

THE COMPACT, AFFORDABLE SPARK H2O OFFERS:

Powerful, proven Cavity Ring-Down Spectroscopy (CRDS) technology

Self-tuning and auto-calibration

Extremely low cost of ownership

Ethernet, 4–20mA and RS-232 connectivity

Fast response, with low gas consumption

H2O analysis over a vast range: 12 ppb to 2000 ppm!

Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms, FOUP Cleaning Tools, Reticle Nests and Sub Fab Environments. You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our T-I Max™ series analyzers to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.

You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy our TIGER OPTICS™ T-I Max™ HCl analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.

In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.

With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max HCl analyzers, based on our new global platform, can detect and continuously monitor HCl with an unprecedented combination of sensitivity, selectivity, and speed of response.

Our GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points.

BENEFITS

Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)

Dramatically improved speed of response & parts-per-trillion detection limits

Drift-free, with calibration traceable to the world’s leading reference labs

Lowest cost of ownership – maintenance