CS Clean Solutions GmbH

With more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries. Our customers include all major chip manufacturers and the world's leading research institutes.

Our environmentally friendly CLEANSORB® technology is developed in Is maning near Munich and marketed through an international sales and service network.

As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environ ment and the climate.

More than 7500 installations worldwide testify to the trust of customers in our unique products and services, which we are always developing with foresight and an eye to the challenges of the future:

• Exhaust gas treatment for e.g. i on implantation, plasma etching, chamber cleaning, photovoltaics, HDP CVD, LPCVD, PECVD, MOCVD, ALD
• Safe, dry chemical conversion of toxic gases into stable solids
• Solutions for research and production
• Global network for service and refill through local partners

The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the CLEANSORB® product portfolio.

PCS TROPO/ PCS STRATO: high efficiency atmospheric plasma for the removal of perfluorinated compounds (PFCs) emitted during semiconductor etching and related processes. Resource saving and water free operation.

PCS EXO: ammonia and hydrogen removal - hybrid plasma system for GaN and similar process applications.

www.csclean.com