Company type
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CS Clean Solutions GmbH
Medium-sized companies (<250 employees or <50 million annual turnover)
Target markets
Electronics·Life science·Machinery and Equipment·Mobility
Industries
Upstream Industry
Portfolio
Environmental Technoloy·Equipment·Micro- / Nanoelektronics·Photovoltaics·Semiconductor Industry·Waste Gas Abatement
Certificates
Contact
Fraunhoferstrasse 4
85737 Ismaning
85737 Ismaning
Contact Person
About this member
With more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries. Our customers include all major chip manufacturers and the world's leading research institutes.
Our environmentally friendly CLEANSORB® technology is developed in Is maning near Munich and marketed through an international sales and service network.
As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environ ment and the climate.
More than 7500 installations worldwide testify to the trust of customers in our unique products and services, which we are always developing with foresight and an eye to the challenges of the future:
- Exhaust gas treatment for e.g. i on implantation, plasma etching, chamber cleaning, photovoltaics, HDP CVD, LPCVD, PECVD, MOCVD, ALD
- Safe, dry chemical conversion of toxic gases into stable solids
- Solutions for research and production
- Global network for service and refill through local partners
The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the CLEANSORB® product portfolio.
PCS TROPO/ PCS STRATO: high efficiency atmospheric plasma for the removal of perfluorinated compounds (PFCs) emitted during semiconductor etching and related processes. Resource saving and water free operation.
PCS EXO: ammonia and hydrogen removal - hybrid plasma system for GaN and similar process applications.
Exhaust Gas Abatement
With more than 25 years of experience serving the semiconductor industry, CS CLEAN SYSTEMS is your reliable partner for exhaust gas abatement, with a primary focus on dry bed absorption. More than 5,000 installations worldwide testify to customer confidence in CS CLEAN SYSTEMS’ unique products and services.
We continue to extend our competence to support developing markets such as the solar industry and photovoltaics as well as MEMS. The key elements which guarantee safety, reliability and ease of handling have been purpose-designed to meet the demands of tomorrow’s advanced materials.
CS CLEAN SYSTEMS is a truly global company with research and development, manufacturing and marketing located in dedicated centers of competence located throughout Europe, Japan, USA, and the Far East.
