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Axcelis Technologies GmbH

Company type

Target markets

High Energy·Ion Implant (High Current·Mid Current)





Max-Planck-Str. 8
85609 Aschheim-Domach

Contact Person

Dirk Müller
0351 79590
Account Manager

About this member

Company Building

For more than two decades, Axcelis Technologies has delivered vital equipment; services and process expertise to the semiconductor manufacturing industry, helping customers reach higher levels of productivity with each new technology generation.

Today, chipmakers from around the globe rely on our tools and technology insights to produce the transistors that power all electronics – from desktops and servers to cell phones, cameras, personal music players and more. Our equipment portfolio comprises a powerful suite of manufacturing technologies: ion implantation, rapid thermal processing, curing and cleaning.

At our Advanced Technology Center in Beverly, Mass., we collaborate with customers and other industry experts to develop next-generation applications and process capabilities. The Advanced Technology Center also supports our commitment to provide customers with the state-of-the-art training they need to optimize equipment performance.

In all that we do, our strategy is singular: align every Axcelis innovation and success with our customers’ goals. We strive to understand the entirety of their challenges and stand ready to deliver the technology, service and support they need to succeed.

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