algorismic gmbh

Optimization of energy efficiency and CO2 footprint in semiconductor subfabs

algorismic GmbH offers a process tool integration for demand-oriented control of subfab devices that has been proven in semiconductor volume production. The intelligent process tool coupling with abatements and pumps (Active Tool Coupling) makes it possible to reduce the CO2 footprint of semiconductor subfabs based on energy and media savings, while at the same time achieving the best possible savings in operating costs.

Your benefits:

• Reduce CO2 footprint
  
• Reduce media consumption and operating costs
  
• No new hardware required
• Use of existing subfab equipment interfaces
  
  

Our solution:

• Subfab360 ATC is an open source based software product
  
• Complete and self-contained on-premise solution
  
• Manufacturer independent
  
• Implementation incl. process- and application-specific safety assessment