June 17, 2025. Effective automation for the semiconductor and electronics industry: With the KMR iisy CR, KUKA offers a versatile autonomous mobile robot (AMR) as a variant for intelligent use in cleanrooms in payload classes 11 and 15 kilograms. The models for the cleanroom have been certified by the Fraunhofer Institute and meet the requirements of ISO cleanroom class 3 in accordance with DIN EN ISO 14644-1.
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Consisting of a mobile platform and the six-axis robot LBR iisy CR, the KMR iisy CR is an ideal mobile manipulator for work in the cleanroom thanks to its low-particle and low-emission properties and ESD certification. After quick and easy installation, it efficiently and cost-effectively implements pick-and-place applications, material transport or palletizing tasks in the warehouse – in semiconductor production, but also in various other areas of the electronics industry.
The LBR iisy CR six-axis robot installed on a mobile platform efficiently implements pick-and-place applications, material transport or palletizing tasks.
In the course of certification, the Fraunhofer Institute also confirmed the electrostatic discharge capability and outgassing behavior of the autonomous mobile robot. It is therefore demonstrably suitable for cleanrooms. It can connect any number of stations without the limitations of conventional material handling solutions. It can also switch quickly between different products, enabling small batches at competitive prices.
While the platform relies on the proven, AI-based software solution KUKA.AMR Fleet as fleet manager, the arm of the robot runs on iiQKA.OS2. The scalable, flexibly adaptable operating system with complete Virtual Robot Controller (VRC) is AI-capable, cyber-resilient and, thanks to its conformity with the new ISO 10218 standard, ideally equipped for the digital manufacturing of the future. This means that not only the hardware, but also the software under the hood comes from KUKA, which enables direct coordination. The intelligent systems help to master even demanding production tasks.
The AMR can be controlled either with the KUKA smartPAD pro or the KUKA smartPLUG, which allows users to connect their own operating devices, such as tablets, via a USB interface. Practical when controlling with smartPAD pro: It can be flexibly removed from the integrated holder, which brings ergonomic benefits for the operator and saves costs, especially in fleets with several AMRs, as not every machine requires its own operating device.
The most important product features at a glance:
Specially developed seals on all six axes of the robot arm guarantee the low particle emissions required for compliance with ISO cleanroom class 3. In addition, the robot is made of cleanroom-compatible materials to minimize outgassing of ammonia or hydrocarbon gases. The conductivity of the entire robot is guaranteed in accordance with DIN EN 61340 so that sensitive components – e.g. wafers – are not damaged by electrostatic discharge. After completion, the robot is cleaned again under cleanroom conditions before it makes its way to the customer. Special packaging for cleanroom machines is used to ensure that no particle contamination occurs during transportation. The surfaces of the robot are resistant to common cleaning chemicals.
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