imec: Imec receives the world’s most advanced High NA EUV system

Today, imec, a world-leading research and innovation center for advanced semiconductor technologies, announces the arrival of the ASML EXE:5200 High-NA-EUV lithography system – the most advanced lithography tool available today. With this strategic milestone, imec strengthens its position as the industry’s stepping stone into the Ångström era, providing its global partner ecosystem with unprecedented early access to the next generation of chip scaling technologies.

Directly integrated with a comprehensive suite of patterning, metrology and material solutions, the High-NA EUV system will provide imec and its ecosystem partners with the power needed to develop sub-2nm logic and high-density memory technologies that will drive the rapid growth of advanced AI and high-performance computing.

Luc Van den hove, CEO of imec: “The past two years have marked an important chapter for High-NA-EUV lithography (0.55 NA), in which imec and ASML have pioneered together with the ecosystem in the joint High-NA-EUV lithography lab in Veldhoven (The Netherlands). With the installation of the EXE:5200 High-NA-EUV lithography system in our 300 mm cleanroom in Leuven (Belgium), we aim to bring these High-NA-EUV patterning technologies to an industrial scale and develop the next use cases for High-NA-EUV.

Its unrivaled resolution, improved overlay performance, high throughput and a new wafer stacker that improves process stability and throughput will give our partners a decisive advantage in accelerating the development of sub-2nm chip technologies. As the industry moves into the Ångström era, High-NA-EUV will be a key technology – and imec is proud to be at the forefront by providing our partners with the earliest and most comprehensive access to this technology.”

This milestone is a key part of imec’s five-year strategic partnership with ASML, supported by the EU (Chips Joint Undertaking and IPCEI), the Flemish government and the Dutch government.

Luc Van den hove: “As an integral part of the EU-funded NanoIC pilot line, this system will play a crucial role in strengthening Europe’s position as a leading location for advanced semiconductor research and development in the coming decades.”

With the ASML EXE:5200 High-NA-EUV lithography system in imec’s cleanroom, imec is clearly positioning itself as the most comprehensive development environment for advanced patterning technologies. The close collaboration in the ecosystem with leading chip manufacturers, equipment, material and resource suppliers, mask manufacturers and metrology experts makes it possible to accelerate learning cycles and improve process stability. This will enable the development and demonstration of state-of-the-art patterning techniques for next-generation logic and memory technologies – delivering breakthroughs that will shape the future of advanced computing and AI.

Christophe Fouquet, CEO of ASML: “The installation of the EXE:5200 at imec marks an important step into the Ångström era. Together, we are accelerating the advancement of High-NA-EUV for the next generations of advanced memory and computing technologies.”

Imec expects the EXE:5200 High-NA-EUV lithography system to be fully qualified by the fourth quarter of 2026. In the meantime, the joint ASML-imec High-NA-EUV lithography lab in Veldhoven will remain operational, ensuring the continuity of High-NA-EUV research and development activities for imec and its partners.

This press release is published in English and has been automatically translated.

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About imec

Imec is a world-leading research and innovation center for advanced semiconductor technologies. Leveraging its state-of-the-art R&E infrastructure and the expertise of more than 6,500 employees, imec drives innovation in semiconductor and system scaling, artificial intelligence, silicon photonics, connectivity and sensing.

Imec’s advanced research enables breakthroughs in a wide range of industries, including computing, healthcare, automotive, industrial, consumer electronics, aerospace and security. Through IC-Link, imec guides companies along the entire chip value chain – from initial concept to volume production – and delivers customized solutions tailored to the most demanding design and production requirements.

Imec works with global market leaders along the entire semiconductor value chain, as well as with technology companies, start-ups, universities and research institutions in Flanders and worldwide. Headquartered in Leuven (Belgium), imec also operates research sites in Belgium, across Europe, in the US and in the GCC region and has a presence on three continents.

In 2024, imec achieved a turnover of 1.034 billion euros.

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Further links

👉 To the original announcement

👉 https://www.imec-int.com/en