January 16, 2025. Particularly in medicine and bioanalytics, results must be determined precisely and reliably. The optical systems from Fraunhofer IPMS enable position control and gentle analysis options that produce precise results in the shortest possible time. The versatile applications of microscanners in medicine include image acquisition for medical endoscopy, confocal microscopy, fluorescence microscopy and spectroscopy.
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Fraunhofer IPMS has many years of experience in the development and manufacture of customer-specific, highly miniaturized MEMS scanners. The microscanners are characterized by large scanning angles and high scanning frequencies and demonstrate excellent long-term stability. This enables them to generate comprehensive, high-resolution medical images that still show good results even after a long period of use. A new development from the institute, the first hybrid 2D vector scanner modules with electromagnetic drive, allow two-dimensional, quasi-static deflection with larger mirror apertures as well as a high vector positioning speed.
Microscanner mirrors enable the precise and fast projection or scanning of a wide variety of materials and objects thanks to spatial beam deflection by means of rotation and translation. Thanks to Fraunhofer IPMS’s proprietary manufacturing technology, the MEMS scanners are highly miniaturized, feature fatigue-free SCS (single crystalline silicon) mechanics, integrated position sensors and high achievable scanning frequencies. The 1- or 2-dimensional design can be realized in any combination of quasi-static and resonant drives. Therefore, a very broad design space for numerous applications of the MEMS scanners can be addressed.
Fraunhofer IPMS microscanners are used, for example, in a therapy laser for the treatment of eye diseases as well as in endoscopy, spectroscopy or medical microscopy. The use of fluorescence markers in modern laser scanning microscopes makes it possible to determine how much tissue is affected by tumor cells while still in the operating room – in the nanometer range. Surrounding healthy tissue is thus spared.
The control algorithms developed at IPMS for the various scan modules ensure highly accurate positioning of the reflective mirror plate. These can be transferred to the digital control of the customer’s system electronics (FPGA or microcontroller). In addition, customer evaluation kits are offered, which customers and partners can use to test the modules in their specific application scenarios. At Fraunhofer IPMS, microscanners can be realized in all combinations of vectorial (quasi-static) and resonant beam positioning as 1D or 2D tilting mirrors or translation mirrors and can be implemented with the same manufacturing technology (AME75).
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Photo: Fraunhofer IPMS
