Microelectronics

Fraunhofer IPMS: Compact microscanner module for laser medical applications

September 8, 2025. Lasers provide valuable services in many areas of medicine. In the UltraLase project (FKZ: 01QE2309C) funded by the German Federal Ministry of Research, Technology and Space (BMFTR), scientists at the Fraunhofer Institute for Photonic Microsystems IPMS have developed a groundbreaking compact microscanner module for portable yet robust and precise laser devices in collaboration with industrial partners Norlase and OptiKron.

Share this Post
Highly miniaturized microscanner module with control electronics for use in ophthalmology. Photo: Fraunhofer IPMS

Contact info

Silicon Saxony

Marketing, Kommunikation und Ă–ffentlichkeitsarbeit

Manfred-von-Ardenne-Ring 20 F

Telefon: +49 351 8925 886

Fax: +49 351 8925 889

redaktion@silicon-saxony.de

Contact person:

Medical lasers have become indispensable in many areas of healthcare, whether in ophthalmology for the correction of defective vision or in dermatology for the removal of pigmentation disorders and tattoos. The newly developed microscanner module, specially designed for the treatment of retinal diseases and glaucoma, sets new standards in miniaturization and resolution.

The UltraLase project has now reached another milestone: the ultra-compact and hermetically sealed optical housing of the microscanner with integrated position detection is functional. The use of the MEMS scanner from Fraunhofer IPMS enables unprecedented miniaturization and a higher resolution.

“Our highly miniaturized MEMS scan module has an electrostatically driven 2D vector scanner with integrated position sensors. The MEMS mirror, which has a highly reflective coating, achieves a reflectivity of over 98% in the visible range,” explains Dr. Thilo Sandner, Head of Active Microoptical Components & Systems at Fraunhofer IPMS. “Thanks to a tilted window, disturbing light reflections in the field of view are avoided.”

The combination of high-precision MEMS scanner mirrors and position sensors in a compact, hermetically sealed housing presented a unique challenge that was successfully mastered. The robust modules are ideal for portable applications and enable precise and highly dynamic positioning of the laser – crucial for safety-relevant interventions, especially in ophthalmology. The scan module is complemented by the compact Vecdres driver electronics developed at Fraunhofer IPMS, which enables the MEMS scanner to be controlled in open-loop or closed-loop operation using the integrated position sensors.

With the UltraLase project, which will be completed at the end of May 2026, the innovative components are ready for transfer into practice or adaptation to other areas of application. Fraunhofer IPMS is looking forward to customer and application-specific projects to further advance the future of laser medical applications.

The institute would like to thank the industrial partners Norlase and OptiKron for the excellent cooperation and the valuable contribution of their system and application knowledge. These contributions were crucial for the development of the module.
 
– – – – – –

Further links

👉 www.ipms.fraunhofer.de  

Photo: Fraunhofer IPMS

Contact info

Silicon Saxony

Marketing, Kommunikation und Ă–ffentlichkeitsarbeit

Manfred-von-Ardenne-Ring 20 F

Telefon: +49 351 8925 886

Fax: +49 351 8925 889

redaktion@silicon-saxony.de

Contact person: