Semiconductor components based on SiC and GaN are ideal for demanding power applications due to their special physical and electrical properties. Their high thermal stability, excellent thermal conductivity, high efficiency at high power densities, resistance to high voltages and long service life make them particularly attractive for power electronics as well as for use in electromobility and modern energy supply.
Fraunhofer ENAS and VX Instruments GmbH are developing a novel test solution for SiC- and GaN-based power semiconductors with their innovative test system as part of their collaboration at the European Test and Reliability Center (ETRC), Europe’s new competence center for testing and reliability evaluation of semiconductor devices. The resulting test technology enables high-precision and parallel testing of semiconductor devices, which significantly improves quality, shortens test time and increases test throughput.
Effective testing of power semiconductors at wafer level ensures greater sustainability in semiconductor manufacturing
“The key breakthrough of the test technology developed jointly with VX Instruments GmbH lies in its ability to test SiC and GaN semiconductor devices directly at wafer level and with complete test coverage – and with unprecedented speed, efficiency and precision. At present, this testing for quality and functionality only takes place at a relatively late stage in the production process, when components based on the power semiconductors have already been assembled into complex power electronic modules using assembly and connection technology. Identifying defects at this stage makes testing extremely costly. Our innovative functional test starts much earlier in the value chain and enables the SiC and GaN wafer to be inspected for weak points and defects even before the semiconductor modules are assembled. This not only reduces the material scrap rate, increases resource efficiency and ensures greater sustainability in production, but also leads to a significant reduction in test costs,” says Prof. Dr. Harald Kuhn, Institute Director at Fraunhofer ENAS, explaining the advantages of the new semiconductor test.
The jointly implemented test system also enables highly parallel testing at wafer level and thus the simultaneous testing of several semiconductor components in a single step. This leads to significantly shorter test times and has a positive effect on the efficiency of the entire production process.
“Our new test solution closes a previously important gap in the field of testing by inspecting components based on the power semiconductors SiC and GaN at wafer level. It is therefore not only an important link for the successful development and introduction of innovative products on the rapidly growing power electronics market, but also a revolutionary step on the way to a sustainable energy supply and climate-friendly mobility,” continues Prof. Dr. Harald Kuhn.
New test system combines static and dynamic testing of SiC and GaN power semiconductors in a single system
Since weak points and defects, such as dislocation defects in the SiC and GaN crystal, can significantly influence the material properties and thus the functionality of the semiconductor material, comprehensive tests of various semiconductor parameters at an early stage of the manufacturing process are a key factor influencing the stability of the subsequent power electronics modules. The new functional test developed by the two partners enables both static and dynamic semiconductor parameters, such as switch-on resistance, switching properties or short-circuit behavior, to be tested comprehensively at an early stage using a single system. The inspection of SiC and GaN semiconductor components at wafer level realized in this way ensures that only flawless and functional components that meet the highest standards of quality and reliability reach the next process step in semiconductor production.
Detecting defects faster with the support of artificial intelligence
The functional testing of semiconductor components generates huge amounts of test data that must be evaluated in the shortest possible time in order to provide rapid feedback in the production process and to be able to intervene in good time when errors and defects are detected. “In order to accelerate this step, we are working together with Fraunhofer ENAS to shorten the evaluation of this test data and thus increase the speed of the test processes. This is made possible by incorporating machine learning methods and integrating artificial intelligence into our new semiconductor test system. By identifying weak points at an early stage, semiconductor manufacturers can ensure in future that only fault-free and functional power semiconductors are used in further production processes, that they are assembled into complex modules and that high-quality, functional semiconductor innovations are created,” says Christian Degenhart, Managing Director of VX Instruments GmbH, summarizing the advantages of the new test solution developed jointly with Fraunhofer ENAS.
The highly efficient test system for power electronic semiconductor components at wafer level developed by Fraunhofer ENAS and VX Instruments GmbH will complement the range of services offered by the recently opened ETRC with innovative test routines and make these available to customers as a service.
About the European Test and Reliability Center
The European Test and Reliability Center (ETRC) at Fraunhofer ENAS is a unique European competence center for testing and reliability evaluation of future semiconductor innovations. With its state-of-the-art testing infrastructure and in-depth expertise as well as a strong network of industry and academia, the ETRC offers comprehensive solutions for evaluating the quality, functionality and longevity of pioneering microtechnologies. The ETRC’s service portfolio includes the research and development of new test and evaluation methods as well as their optimization for specific applications. In addition, the ETRC offers comprehensive services for the verification of small series as well as practical consulting for companies. A specialized training and further education program also enables the targeted qualification of specialists in test procedures and reliability assessments.
About VX Instruments GmbH
VX Instruments GmbH (VXI) is a technology company based in Landshut, Bavaria, which was founded in 1989 by Johann Degenhart as “IngenieurbĂĽro Johann Degenhart”. Since then, VXI has developed into a recognized specialist for high-precision semiconductor test systems and electronic measuring instruments – with customers in over 30 countries worldwide. With over 30 years of experience in metrology, VXI delivers high-end solutions for the products of tomorrow – including applications in the automotive industry, semiconductor manufacturing and renewable energy. VX Instruments’ systems are characterized by exceptional engineering, interdisciplinary application know-how and an outstanding isolated design that enables highest precision at maximum speed. Around 500 systems with VX Instruments technology are in use worldwide – often in 24-hour continuous operation, without compromising measurement accuracy. VXI’s test systems support both front-end and back-end testing and continue to set new standards, particularly in the field of power semiconductors.
About Fraunhofer ENAS
The particular strength of the Fraunhofer Institute for Electronic Nano Systems ENAS lies in the holistic development of “intelligent systems” for a wide range of applications. The institute’s research activities range from the development of novel wafer and packaging technologies to the manufacture of electronic components, micro and nano sensors and actuators, as well as the development of system concepts and system integration technologies, including communication interfaces. Using state-of-the-art and AI-supported test and reliability methods, Fraunhofer ENAS transfers the developed solutions into practical use. The institute accompanies customer projects from the idea to the design, technology development or implementation based on existing technologies to the tested prototype.
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Further links
👉 www.enas.fraunhofer.de/etrc
👉 www.vxinstruments.com
Photo: VX Instruments GmbH
