Fabmatics launches new HERO for the cleanroom

This production area places high demands on process control, such as double exposures, special machine assignments and complex scheduling. The wafers must meet the right photomasks (reticles) at the right time at the exposure machines. Downtime or waiting times at the valuable lithography machines are unacceptable. The most expensive area of the factory must run continuously and flawlessly in order for optimizing its equipment and for achieving maximum performance.

Mask logistics play an important role here because they have to function in parallel with wafer logistics in a completely synchronized and stable manner. However, manual reticle handling can lead to inefficiencies and errors that impair the entire production process. Additionally, ergonomically unfavorable reticle pod loading points make the work of system operators more difficult and pose more of a risk for accidents.

The newest member of the HERO Mobile Robots family the HERO Scout is a state-of-the-art AMR that redefines reticle handling in semiconductor cleanrooms. Equipped with a highly sensitive cobot arm, the HERO Scout can manage the loading and unloading of mask load ports at various heights, even in ergonomically challenging positions and confined spaces.

• Cobot for flexible handling: The HERO Scout’s cobot arm offers maximum flexibility and ensures precise and safe handling of reticle pods.
• Longest reach in its class: With a reach of 200 mm to 1,700 mm, it can handle the load ports with ease – even the load ports on steppers, which are usually very high up.
• Compact and cleanroom-compatible: As the smallest AMR of its kind, the HERO Scout is designed for navigation in confined spaces and is therefore ideal for confined factory areas.
• Innovative sensor and camera technology: Equipped with 3D cameras for obstacle detection and avoidance, the HERO Scout works safely and autonomously in changing environments.
• Ultra-clean design: Certified to ISO 2 / US FED 0.1 cleanroom standards, it ensures contamination-free operations.

Enhancing Efficiency and Safety

The HERO Scout uses the HERO family’s proven inductive on-the-fly charging technology to minimize charging-related pause times. With two buffer slots for efficient swap handling and adaptive speed control, it guarantees safe and fast transportation of different reticle pods. Its SLAM and auto-teaching functions ensure fast setup and adaptation to changes in the production environment, which also minimizes the time required for commissioning and maintenance.

Ensuring Operator Safety

The HERO Scout is equipped with advanced sensor and camera technology to ensure safe operation in environments where humans and machines work together collaboratively. Its sensitive cobot arm and Fail Safe over EtherCAT (FsoE) technology increase safety by, for example, shortening response times for emergency stop commands and other safety precautions.

Conclusion

The HERO Scout redefines the handling and transportation of reticle pods in semiconductor manufacturing by offering more flexibility, safety and efficiency. With its state-of-the-art technology, compact design and robust features, the HERO Scout is the ideal solution for semiconductor fabs looking to take their reticle logistics, lithography scheduling and associated machine efficiency to the next level.

Further links:

Challenges of Reticle Transport and Handling in the Cleanroom

HERO Scout Product Overview

Download: Technical Data HERO Scout [pdf]