March 11, 2025. On March 11, ASML Holding N.V. (ASML) and imec, a leading research and innovation center for nanoelectronics and digital technologies, announced that they have signed a new strategic partnership agreement focused on research and sustainability.
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The agreement will run for five years and aims to deliver valuable solutions in two areas by combining the knowledge and expertise of ASML and imec. The first is to develop solutions that advance the semiconductor industry, and the second is to develop initiatives that focus on sustainable innovation.
The collaboration covers ASML’s entire product portfolio, with a focus on high-end node development, utilizing ASML systems such as 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single and multi-beam technologies. These tools will be installed in imec’s state-of-the-art pilot line and integrated into the NanoIC pilot line funded by the EU and Flanders, providing the international semiconductor ecosystem with the most advanced infrastructure for sub-2 nm research and development. Research and development focus areas will also include silicon photonics, memory and advanced packaging, enabling extensive innovation for future semiconductor-based AI applications in various markets.
A new area of collaboration is a significant contribution to funding innovative ideas and activities in imec’s research funnel that deliver environmental and societal benefits.
Christophe Fouquet, President and CEO of ASML, comments: “This agreement marks the next step in the long-standing collaboration between ASML and imec. It signals our shared ambition to develop solutions for the semiconductor industry and fits in with our strategy to invest in technology and innovation that will benefit society as a whole.”
“We are pleased to continue our long-standing unique partnership with ASML, providing the industry with access to the most advanced patterning solutions for over 30 years,” said Luc Van den hove, President and CEO of imec. “By incorporating ASML’s entire product portfolio, we can extend and further expand the capabilities of our pilot line and provide the entire semiconductor ecosystem with the most advanced research and development to address the challenges of AI-driven technological advancement. As imec has a strong focus on sustainable innovation, it is a great addition that this has been explicitly included in our partnership.”
ASML’s investment in the partnership is complemented by funding provided by the Chips Joint Undertaking and the Flemish government (for the realization of the EU Chips Act NanoIC pilot line) and by the Dutch government (as an important project of common European interest).
The acquisition and operation of the NanoIC pilot line is jointly funded by the Chips Joint Undertaking through the European Union’s Digital Europe (101183266) and Horizon Europe (101183277) programs and by the participating countries Belgium (Flanders), France, Germany, Finland, Ireland and Romania. More information can be found at nanoic-project.eu.”
The deployment of the 0.55 NA technology at imec was part of the Next Gen-7A project (IPCEI22201), funded by the Dutch government as an Important Project of Common European Interest (IPCEI). More information can be found at IPCEI ME/CT.
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Photo: pixabay
