Stable Control and efficient design of industrial plasma processes with plasma diagnostics

Plasma technologies for surface modification and layer deposition are industrially established and many products in semiconductor technology, the automotive industry, medical technology, etc. are no longer conceivable today without technological plasma processes.

Specific process control is essential to ensure process reliability when using plasma technology. Continuous further development of the relevant diagnostics is required to optimize and ultimately reduce the costs of production processes.

The workshop “Stable Control and efficient design of industrial plasma processes with plasma diagnostics” is dedicated to this topic. Renowned experts from research institutions will present basic insights as well as new innovative aspects for a stable process control. While Industrial partners will demonstrate the implementation of well established tools by some impressive examples. Simple methods that are well suited for industrial use will also be presented. But also very specialized diagnostic procedures and new possibilities by using artificial intelligence will be addressed.