Busch Vacuum Solutions
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The future of vacuum. Since 1963.
Busch Vacuum Solutions offers vacuum solutions for all industries and semiconductor applications.
The trusted choice. For semiconductor manufacturing.
Reliable perfomance, predictable, with low cost of ownership. Vacuum solutions from Busch are the trusted choice. For all semiconductor applications. From load lock chambers to the harshest, particle-generating processes. We have provided leading semiconductor fabs worldwide with vacuum systems. And with single-source onsite support afterwards. Our vast experience. For your process.
Industrial Vacuum Systems Building
Busch offers vacuum system solutions. This means we are your partners in a process. We don’t just ship you a vacuum pump. We work together on each step to create a fully operational, sustainable, custom-fit system. From initial analysis to design, from installation to top quality service.
No matter your location, no matter your application, whether it is modular or customized. Busch will help you find the solution that is perfect for you and your needs.
Busch Vacuum Solutions is the European market leader in on-site vacuum and abatement services for semiconductor industries, with award winning, extensive sub fab management knowledge, whereof our customers profit every day.
Ensuring a failure free operation is our highest priority. With our unsurpassed network of highly skilled service personnel we strive for continuous improvement, cost reductions and the highest quality standards, fulfilling demanding customer needs in semiconductor industries”. In our remanufacturing centers we rebuild more than 2.000 vacuum pumps from various pump manufacturers every year.
With around 110 engineers and technicians specialized in the field of Semiconductor Industries we always put the customer in the center of our daily operations.”
We keep your vacuum and abatement systems up and running. With our highly experienced on-site service teams.
Busch offers full sub fab management concepts, or any on-site service solution tailored to your specific requirements. To support you the way you need it.