{"id":542306,"date":"2026-07-20T14:20:42","date_gmt":"2026-07-20T12:20:42","guid":{"rendered":"https:\/\/silicon-saxony.de\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/"},"modified":"2026-07-20T14:22:33","modified_gmt":"2026-07-20T12:22:33","slug":"new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/","title":{"rendered":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing"},"content":{"rendered":"<p>PFAS (per- and polyfluoroalkyl substances) play an important role today in numerous manufacturing processes in the semiconductor industry\u2014for example, in lithography, plasma etching, and cleanroom applications. At the same time, these substances are increasingly coming under the scrutiny of European regulations due to their environmental and health impacts.<\/p>\n<p><\/p>\n<p>The white paper makes it clear that a short-term replacement of PFAS in many applications is currently not technically feasible. Instead, the authors advocate for a scientifically sound and innovation-oriented approach that brings together research, industry, and policymakers.<\/p>\n<p><\/p>\n<p><b>The focus is on three key research priorities:<\/b><\/p>\n<p><\/p>\n<ul>\n<li>Improved detection and monitoring of PFAS through new measurement and monitoring methods,<\/li>\n<li>Reducing emissions and promoting the circular economy, including through new recycling and treatment technologies,<\/li>\n<li>Developing and validating alternative materials and processes to minimize the use of PFAS in the long term.<\/li>\n<\/ul>\n<p><\/p>\n<p>The recommendations are aimed in particular at European research and funding programs and are intended to help provide targeted support for future innovations in the semiconductor sector. The goal is to strengthen technological excellence, sustainability, and security of supply in equal measure.<\/p>\n<p><\/p>\n<p>As a partner in the EU project ALLPROS2029, Silicon Saxony contributes its expertise to the work of the European Industrial Alliance on Processors and Semiconductor Technologies and supports the exchange between industry, research, and policymakers. The results of the working groups make an important contribution to translating scientific findings into concrete recommendations for action for the European semiconductor strategy.<\/p>\n<p><\/p>\n<p>The white paper offers companies, research institutions, and policymakers valuable guidance on one of the most important future topics currently facing the European semiconductor industry.<\/p>\n<p><\/p>\n<p>The full white paper is available on the ALLPROS2029 website at <a href=\"https:\/\/allpros.eu\/resources\/white-paper-pfas-research-priorities-semiconductor-manufacturing\" target=\"_blank\"><b>download<\/b><\/a>.<\/p>\n<p><\/p>\n<p><b>Contact at Silicon Saxony e. V.:<\/b><\/p>\n<p>Alesia L\u00e4ssig<\/p>\n<p>E-mail: alesia.laessig@silicon-saxony.de<\/p>\n<p>Phone: +49 351 8503 2924<\/p>\n","protected":false},"excerpt":{"rendered":"<p>How can Europe\u2019s semiconductor industry ensure its technological competitiveness while reducing the use of PFAS in the long term? Answers to these questions are provided in the new white paper by the PFAS Working Group of the European Industrial Alliance on Processors and Semiconductor Technologies, which was published as part of ALLPROS2029.<\/p>\n","protected":false},"author":3,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"inline_featured_image":false,"footnotes":"","_links_to":"","_links_to_target":""},"categories":[4818],"tags":[1953,1954,4783,1970],"class_list":["post-542306","post","type-post","status-publish","format-standard","hentry","category-microelectronics","tag-funding","tag-research-development","tag-semiconductors","tag-sustainability"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony\" \/>\n<meta property=\"og:description\" content=\"How can Europe\u2019s semiconductor industry ensure its technological competitiveness while reducing the use of PFAS in the long term? 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Development\",\"Semiconductors\",\"Sustainability\"],\"articleSection\":[\"Microelectronics\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/\",\"url\":\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/\",\"name\":\"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony\",\"isPartOf\":{\"@id\":\"https:\/\/silicon-saxony.de\/en\/#website\"},\"datePublished\":\"2026-07-20T12:20:42+00:00\",\"dateModified\":\"2026-07-20T12:22:33+00:00\",\"author\":{\"@id\":\"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/098cd473f5dd7707320dd1e252e15ac6\"},\"breadcrumb\":{\"@id\":\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/silicon-saxony.de\/en\/home\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/silicon-saxony.de\/en\/#website\",\"url\":\"https:\/\/silicon-saxony.de\/en\/\",\"name\":\"Silicon Saxony\",\"description\":\"Germany&#039;s Hightech Network - Semiconductors, Software, Robotics\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/silicon-saxony.de\/en\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/098cd473f5dd7707320dd1e252e15ac6\",\"name\":\"publizer2silisax\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/c4acbd63e28aa0bc7909adc90d5ef38c3fdb5e4c7922782d8eca389d00ffbd0d?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/c4acbd63e28aa0bc7909adc90d5ef38c3fdb5e4c7922782d8eca389d00ffbd0d?s=96&d=mm&r=g\",\"caption\":\"publizer2silisax\"},\"url\":\"https:\/\/silicon-saxony.de\/en\/author\/publizer2silisax\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/","og_locale":"en_US","og_type":"article","og_title":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony","og_description":"How can Europe\u2019s semiconductor industry ensure its technological competitiveness while reducing the use of PFAS in the long term? Answers to these questions are provided in the new white paper by the PFAS Working Group of the European Industrial Alliance on Processors and Semiconductor Technologies, which was published as part of ALLPROS2029.","og_url":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/","og_site_name":"Silicon Saxony","article_published_time":"2026-07-20T12:20:42+00:00","article_modified_time":"2026-07-20T12:22:33+00:00","author":"publizer2silisax","twitter_card":"summary_large_image","twitter_misc":{"Written by":"publizer2silisax","Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/#article","isPartOf":{"@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/"},"author":{"name":"publizer2silisax","@id":"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/098cd473f5dd7707320dd1e252e15ac6"},"headline":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing","datePublished":"2026-07-20T12:20:42+00:00","dateModified":"2026-07-20T12:22:33+00:00","mainEntityOfPage":{"@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/"},"wordCount":303,"keywords":["Funding","Research &amp; Development","Semiconductors","Sustainability"],"articleSection":["Microelectronics"],"inLanguage":"en-US"},{"@type":"WebPage","@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/","url":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/","name":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing - Silicon Saxony","isPartOf":{"@id":"https:\/\/silicon-saxony.de\/en\/#website"},"datePublished":"2026-07-20T12:20:42+00:00","dateModified":"2026-07-20T12:22:33+00:00","author":{"@id":"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/098cd473f5dd7707320dd1e252e15ac6"},"breadcrumb":{"@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/silicon-saxony.de\/en\/new-white-paper-outlines-research-priorities-for-addressing-pfas-in-semiconductor-manufacturing\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/silicon-saxony.de\/en\/home\/"},{"@type":"ListItem","position":2,"name":"New White Paper Outlines Research Priorities for Addressing PFAS in Semiconductor Manufacturing"}]},{"@type":"WebSite","@id":"https:\/\/silicon-saxony.de\/en\/#website","url":"https:\/\/silicon-saxony.de\/en\/","name":"Silicon Saxony","description":"Germany&#039;s Hightech Network - Semiconductors, Software, Robotics","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/silicon-saxony.de\/en\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Person","@id":"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/098cd473f5dd7707320dd1e252e15ac6","name":"publizer2silisax","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/silicon-saxony.de\/en\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/c4acbd63e28aa0bc7909adc90d5ef38c3fdb5e4c7922782d8eca389d00ffbd0d?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/c4acbd63e28aa0bc7909adc90d5ef38c3fdb5e4c7922782d8eca389d00ffbd0d?s=96&d=mm&r=g","caption":"publizer2silisax"},"url":"https:\/\/silicon-saxony.de\/en\/author\/publizer2silisax\/"}]}},"_links":{"self":[{"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/posts\/542306","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/comments?post=542306"}],"version-history":[{"count":1,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/posts\/542306\/revisions"}],"predecessor-version":[{"id":542309,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/posts\/542306\/revisions\/542309"}],"wp:attachment":[{"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/media?parent=542306"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/categories?post=542306"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/silicon-saxony.de\/en\/wp-json\/wp\/v2\/tags?post=542306"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}