Fabmatics: New HERO for the cleanroom launched on the market

Meeting the challenges of photolithography

In the highly complex and investment-intensive lithography process of semiconductor production, photomasks are used to project the finest micro- and nanostructures onto the light-sensitive layer on the wafer surface. Up to 50 lithography layers are created in the entire production process – a complex and time-consuming procedure that forms a decisive basis for the microchips to be manufactured.

This production area places high demands on process control, such as double exposures, special machine assignments and complex scheduling. The wafers must meet the right photomasks (reticles) at the right time at the exposure systems. Downtime or waiting times at the valuable lithography machines are unacceptable. The most expensive area of the factory must run continuously and error-free in order to make optimum use of the systems and achieve maximum throughput.

Mask logistics play an important role here, as they must function in parallel with wafer logistics in a completely synchronized and stable manner. However, manual handling of photomasks leads to inefficiencies and errors that affect the entire production process. In addition, ergonomically unfavorable reticle pod loading points make the work of system operators more difficult and pose an additional risk of accidents.

The need for automation

In an environment where downtime and waiting times cannot be tolerated, automation is essential. The new HERO Scout mobile robot meets this need by ensuring continuous, scheduled and error-free delivery to exposure systems, thereby optimizing machine efficiency (Overall Equipment Efficiency – OEE).

The HERO Scout: Flexible automation solution for reticle pods in cleanrooms

As the latest addition to Fabmatics’ established HERO product family, the HERO Scout mobile robot redefines reticle handling in semiconductor cleanrooms. Equipped with a highly sensitive cobot arm, it can handle the loading and unloading of mask load ports at various heights, even in ergonomically challenging positions and in confined spaces.

Key features and benefits

• Cobot for flexible handling: The HERO Scout’s cobot arm offers maximum flexibility and ensures precise and safe handling of reticle pods.
• Longest reach in its class: With a reach of 200 mm to 1,700 mm, it effortlessly handles the loading of load ports – even the usually very high load ports on steppers .
• Compact and cleanroom-compatible: As the smallest AMR of its kind, the HERO Scout is designed for navigation in confined spaces and is therefore ideal for confined factory areas.
• Innovative sensor and camera technology: Equipped with 3D cameras for obstacle detection and avoidance, the HERO Scout works safely and autonomously in changing environments.
• Ultra-clean design: Certified to ISO 2 / US FED 0.1 cleanroom standards, it ensures contamination-free operations.

Increased efficiency

The HERO Scout uses the HERO family’s proven on-the-fly inductive charging technology to minimize charging-related pause times. With two buffer slots for efficient swap handling and adaptive speed control, it guarantees safe and fast transportation of different reticle pods. Its SLAM and auto-teaching functions ensure quick setup and adaptation to changes in the production environment, which also minimizes the time required for commissioning and maintenance.

Ensuring workplace safety

The HERO Scout is equipped with advanced sensor and camera technology to ensure safe operation in environments where people and machines work together collaboratively. Its sensitive cobot arm and Fail Safe over EtherCAT (FsoE) technology increase safety by, for example, shortening response times for emergency stop commands and other safety precautions.

Conclusion

The HERO Scout redefines reticle pod handling and transportation in semiconductor manufacturing by offering more flexibility, safety and efficiency. With its state-of-the-art technology, compact design and robust features, the HERO Scout is the ideal solution for semiconductor fabs looking to take their reticle logistics, lithography scheduling and associated machine efficiency to the next level.

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Further links

👉 www.fabmatics.com
👉 Product information HERO Scout
👉 Technical data HERO Scout (pdf)
 

Photo: Fabmatics